DIY semiconductor lithography toolkit for MSLA printers: mask design, OPC, process calculators, spacer lithography
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Updated
Sep 14, 2026 - Python
DIY semiconductor lithography toolkit for MSLA printers: mask design, OPC, process calculators, spacer lithography
The project implements state-of-the-art computational lithography algorithms used in semiconductor manufacturing, complete with educational documentation and working examples!
Per-pixel binary discrete flow matching with trajectory-attached fine-tuning for inverse lithography (OPC)
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